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Title: Supercritical fluid molecular spray film deposition and powder formation

Abstract

Solid films are deposited, or fine powders formed, by dissolving a solid material into a supercritical fluid solution at an elevated pressure and then rapidly expanding the solution through a short orifice into a region of relatively low pressure. This produces a molecular spray which is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder. Upon expansion and supersonic interaction with background gases in the low pressure region, any clusters of solvent are broken up and the solvent is vaporized and pumped away. Solute concentration in the solution is varied primarily by varying solution pressure to determine, together with flow rate, the rate of deposition and to control in part whether a film or powder is produced and the granularity of each. Solvent clustering and solute nucleation are controlled by manipulating the rate of expansion of the solution and the pressure of the lower pressure region. Solution and low pressure region temperatures are also controlled.

Inventors:
 [1]
  1. (Richland, WA)
Publication Date:
Research Org.:
BATTELLE MEMORIAL INSTITUTE
OSTI Identifier:
865812
Patent Number(s):
US 4582731
Assignee:
Battelle Memorial Institute (Richland, WA) PNNL
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
supercritical; fluid; molecular; spray; film; deposition; powder; formation; solid; films; deposited; fine; powders; formed; dissolving; material; solution; elevated; pressure; rapidly; expanding; orifice; region; relatively; produces; directed; substrate; deposit; thereon; discharged; collection; chamber; collect; expansion; supersonic; interaction; background; gases; clusters; solvent; broken; vaporized; pumped; solute; concentration; varied; primarily; varying; determine; flow; rate; control; produced; granularity; clustering; nucleation; controlled; manipulating; temperatures; molecular spray; rapidly expanding; pressure region; film deposition; supercritical fluid; flow rate; solid material; collection chamber; powder form; elevated pressure; fine powder; solid films; solute concentration; powders formed; fluid solution; fine powders; film thereon; solid film; fluid molecular; spray film; powder formation; /427/118/210/264/

Citation Formats

Smith, Richard D. Supercritical fluid molecular spray film deposition and powder formation. United States: N. p., 1986. Web.
Smith, Richard D. Supercritical fluid molecular spray film deposition and powder formation. United States.
Smith, Richard D. Wed . "Supercritical fluid molecular spray film deposition and powder formation". United States. https://www.osti.gov/servlets/purl/865812.
@article{osti_865812,
title = {Supercritical fluid molecular spray film deposition and powder formation},
author = {Smith, Richard D.},
abstractNote = {Solid films are deposited, or fine powders formed, by dissolving a solid material into a supercritical fluid solution at an elevated pressure and then rapidly expanding the solution through a short orifice into a region of relatively low pressure. This produces a molecular spray which is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder. Upon expansion and supersonic interaction with background gases in the low pressure region, any clusters of solvent are broken up and the solvent is vaporized and pumped away. Solute concentration in the solution is varied primarily by varying solution pressure to determine, together with flow rate, the rate of deposition and to control in part whether a film or powder is produced and the granularity of each. Solvent clustering and solute nucleation are controlled by manipulating the rate of expansion of the solution and the pressure of the lower pressure region. Solution and low pressure region temperatures are also controlled.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1986},
month = {Wed Jan 01 00:00:00 EST 1986}
}

Patent:

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