Quartz resonator processing system
- Rustburg, VA
Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.
- Research Organization:
- General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
- DOE Contract Number:
- EY-76-C-04-0656
- Assignee:
- United States of America as represented by Secretary of Army (Washington, DC)
- Patent Number(s):
- US 4392287
- OSTI ID:
- 864611
- Country of Publication:
- United States
- Language:
- English
Similar Records
Vacuum processing system for quartz-crystal resonators
Method of making a quartz resonator
Related Subjects
resonator
processing
disclosed
single
chamber
ultra-high
vacuum
oduction
hermetically
sealed
resonators
electrode
metallization
sealing
carried
cleaning
bake-out
air
exposure
steps
common
located
rotatable
wheel-like
adapted
move
plurality
individual
component
sets
flat
pack
unit
past
discretely
stations
whereupon
deposition
takes
followed
placement
ceramic
covers
frame
containing
element
stage
pair
hydraulic
rams
including
heating
elements
effect
metallized
bonding
single chamber
heating elements
quartz resonator
heating element
hermetically sealed
vacuum chamber
processing steps
ultra-high vacuum
processing step
electrode metal
sealed quartz
resonator element
ceramic cover
frame containing
including heat
hermetically seal
individual component
rotatable wheel
vacuum process
/29/228/