Process for the production of ultrahigh purity silane with recycle from separation columns
Patent
·
OSTI ID:864275
- Tonawanda, NY
Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated.
- Assignee:
- Union Carbide Corporation (New York, NY)
- Patent Number(s):
- US 4340574
- Application Number:
- 06/182,148
- OSTI ID:
- 864275
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/423/203/
added
arrangement
bottom
causing
column
columns
course
dichlorosilanes
employed
feed
formed
hydrogen
hydrogenation
hydrogenation step
impurities
materials
metallurgical
metallurgical silicon
process
process stream
processes
production
purity
purity silane
reaction
reactions
reactors
readily
readily separated
recycle
redistribution
removed
separated
separation
separation colum
separation column
separation columns
sequential
silane
silicon
slip
slip stream
step
stream
streams
subjected
tetrachloride
tri-
ultrahigh
waste
waste material
waste materials
whereby
added
arrangement
bottom
causing
column
columns
course
dichlorosilanes
employed
feed
formed
hydrogen
hydrogenation
hydrogenation step
impurities
materials
metallurgical
metallurgical silicon
process
process stream
processes
production
purity
purity silane
reaction
reactions
reactors
readily
readily separated
recycle
redistribution
removed
separated
separation
separation colum
separation column
separation columns
sequential
silane
silicon
slip
slip stream
step
stream
streams
subjected
tetrachloride
tri-
ultrahigh
waste
waste material
waste materials
whereby