Sputter coating of microspherical substrates by levitation

Patent · 31 December 1980

OSTI ID:864054

Lowe, Arthur T ^[1]; Hosford, Charles D ^[2]

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1. Tempe, AZ
2. Los Alamos, NM

Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM
• DOE Contract Number: W-7405-ENG-36
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4302311
• OSTI ID: 864054
• Country of Publication: United States
• Language: English

Related Subjects

/204/428/
11
12
16
apparatus
applications
array
chamber
chamber pressure
coated
coating
coating method
collimated
comprising
dimple
form
fusion
fusion applications
gas
gas outlet
glass
individual
individual gas
laser
laser fusion
levitating
levitation
machined
metals
method
microballoons
microspheres
microspherical
nonmetals
outlets
parallel
parallel array
particularly
particularly useful
pressures
projecting
simultaneously
sputter
sputter coating
structure
substantially
substantially uniform
substantially uniformly
substrates
torr
total
uniformly
uniformly coated
upwardly
useful