Method for etching thin films of niobium and niobium-containing compounds for preparing superconductive circuits
- Darien, IL
- Woodridge, IL
An improved method of preparing thin film superconducting electrical circuits of niobium or niobium compounds in which a thin film of the niobium or niobium compound is applied to a nonconductive substrate, and covered with a layer of photosensitive material. The sensitive material is in turn covered with a circuit pattern exposed and developed to form a mask of the circuit in photoresistive material on the surface of the film. The unmasked excess niobium film is removed by contacting the substrate with an aqueous etching solution of nitric acid, sulfuric acid and hydrogen fluoride, which will rapidly etch the niobium compound without undercutting the photoresist. A modification of the etching solution will permit thin films to be lifted from the substrate without further etching.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4266008
- OSTI ID:
- 863882
- Country of Publication:
- United States
- Language:
- English
Similar Records
Method for etching thin films of niobium and niobium-containing compounds for preparing superconductive circuits
Method for etching thin films of niboium and niobium-containing compounds for preparing superconductive circuits
Related Subjects
etching
films
niobium
niobium-containing
compounds
preparing
superconductive
circuits
improved
film
superconducting
electrical
compound
applied
nonconductive
substrate
covered
layer
photosensitive
material
sensitive
circuit
pattern
exposed
developed
form
mask
photoresistive
surface
unmasked
excess
removed
contacting
aqueous
solution
nitric
acid
sulfuric
hydrogen
fluoride
rapidly
etch
undercutting
photoresist
modification
permit
lifted
resistive material
electrical circuits
containing compound
conductive substrate
improved method
nitric acid
sulfuric acid
electrical circuit
circuit pattern
containing compounds
sensitive material
superconducting electrical
photosensitive material
hydrogen fluoride
conducting electric
conductive circuit
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