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Polycrystalline silicon semiconducting material by nuclear transmutation doping

Patent ·
OSTI ID:863237
A NTD semiconductor material comprising polycrystalline silicon having a mean grain size less than 1000 microns and containing phosphorus dispersed uniformly throughout the silicon rather than at the grain boundaries.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
DOE Contract Number:
W-7405-ENG-26;
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4129463
OSTI ID:
863237
Country of Publication:
United States
Language:
English