skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
DOI:https://doi.org/10.1116/1.1565343· OSTI ID:859555

No abstract prepared.

Research Organization:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
DE-AC05-00OR22725
OSTI ID:
859555
Report Number(s):
P04-121295; TRN: US200522%%214
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 21, Issue 3
Country of Publication:
United States
Language:
English