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Title: Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition

Abstract

No abstract prepared.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Director. Office of Science. Office of Basic Energy Sciences. Contracts DE-AC03-76SF00098 and W-7405-ENG-36
OSTI Identifier:
843036
Report Number(s):
LBNL-45428
Journal ID: ISSN 0021-8979; JAPIAU; R&D Project: Z2C084; TRN: US0503816
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 88; Journal Issue: 5; Other Information: Journal Publication Date: 09/01/2000; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; DEPOSITION; RELAXATION; STRESSES

Citation Formats

Monteiro, Othon R., Lee, Doug H., Lo, Roger Yu, Walter, Kevin C., and Nastasi, Michael. Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition. United States: N. p., 1999. Web.
Monteiro, Othon R., Lee, Doug H., Lo, Roger Yu, Walter, Kevin C., & Nastasi, Michael. Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition. United States.
Monteiro, Othon R., Lee, Doug H., Lo, Roger Yu, Walter, Kevin C., and Nastasi, Michael. Wed . "Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition". United States.
@article{osti_843036,
title = {Relaxation of stresses in ta-C prepared by filtered cathodic arc deposition},
author = {Monteiro, Othon R. and Lee, Doug H. and Lo, Roger Yu and Walter, Kevin C. and Nastasi, Michael},
abstractNote = {No abstract prepared.},
doi = {},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 5,
volume = 88,
place = {United States},
year = {1999},
month = {9}
}