skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Out-diffusion and precipitation of copper in silicon: an electrostatic model

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Advanced Light Source (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
842085
Report Number(s):
LBNL-49622; LBNL/ALS-43450
Journal ID: ISSN 0031-9007; PRLTAO; R&D Project: 513330; TRN: US200515%%1016
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Journal Article
Journal Name:
Physical Review Letters
Additional Journal Information:
Journal Volume: 85; Journal Issue: 23; Other Information: Journal Publication Date: 12/4/2000; PBD: 4 Aug 1999; Journal ID: ISSN 0031-9007
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COPPER; ELECTROSTATICS; PRECIPITATION; SILICON; DIFFUSION; COPPER SILICIDES; INFRARED SPECTROMICROSCOPY LEFUMINOSAE VIGNA RADIATA L. PHOSPHORUS RHIZOSPHERE SYNCHROTRON ADVANCED LIGHT SOURCE ALS

Citation Formats

Flink, C., Feick, H., McHugo, S.A., Seifert, W., Hieslmair, H., Heiser, T., Istratov, A.A., and Weber, E.R. Out-diffusion and precipitation of copper in silicon: an electrostatic model. United States: N. p., 1999. Web.
Flink, C., Feick, H., McHugo, S.A., Seifert, W., Hieslmair, H., Heiser, T., Istratov, A.A., & Weber, E.R. Out-diffusion and precipitation of copper in silicon: an electrostatic model. United States.
Flink, C., Feick, H., McHugo, S.A., Seifert, W., Hieslmair, H., Heiser, T., Istratov, A.A., and Weber, E.R. Wed . "Out-diffusion and precipitation of copper in silicon: an electrostatic model". United States.
@article{osti_842085,
title = {Out-diffusion and precipitation of copper in silicon: an electrostatic model},
author = {Flink, C. and Feick, H. and McHugo, S.A. and Seifert, W. and Hieslmair, H. and Heiser, T. and Istratov, A.A. and Weber, E.R.},
abstractNote = {No abstract prepared.},
doi = {},
journal = {Physical Review Letters},
issn = {0031-9007},
number = 23,
volume = 85,
place = {United States},
year = {1999},
month = {8}
}