Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
Journal Article
·
· Journal of Vacuum Science and Technology
No abstract prepared.
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Synchrotron Radiation Lightsource (SSRL)
- Sponsoring Organization:
- USDOE Office of Science (US)
- DOE Contract Number:
- AC03-76SF00515
- OSTI ID:
- 831560
- Report Number(s):
- SLAC-REPRINT-2003-195; TRN: US0406966
- Journal Information:
- Journal of Vacuum Science and Technology, Vol. A21; Other Information: PBD: 1 Jan 2003
- Country of Publication:
- United States
- Language:
- English
Similar Records
Chemical structure and physical properties of diamond-like amorphous carbon films prepared by magnetron sputtering
The effect of substrate temperature on the structure and hardness of magnetron sputter deposited carbon nitride films
Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering
Journal Article
·
Thu Nov 01 00:00:00 EST 1990
· Journal of Materials Research; (USA)
·
OSTI ID:831560
+3 more
The effect of substrate temperature on the structure and hardness of magnetron sputter deposited carbon nitride films
Journal Article
·
Thu Apr 01 00:00:00 EST 1999
· Physica Status Solidi A: Applied Research
·
OSTI ID:831560
+1 more
Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering
Journal Article
·
Fri Nov 01 00:00:00 EST 1991
· IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)
·
OSTI ID:831560
+1 more