Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution.
Conference
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OSTI ID:824607
No abstract prepared.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 824607
- Report Number(s):
- ANL/XFD/CP-111145; TRN: US200419%%115
- Resource Relation:
- Conference: SPIE's 48th Annual Meeting, San Diego, CA (US), 08/03/2003--08/08/2003; Other Information: PBD: 29 Jul 2003
- Country of Publication:
- United States
- Language:
- English
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