# Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating

## Abstract

In low-pressure discharges, where the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the non-Maxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equations for the kinetic description of nonlocal, nonuniform, nearly collisionless plasmas of low-pressure discharges is reported. It consists of the nonlocal conductivity operator and the averaged kinetic equation for calculation of the non-Maxwellian EEDF. This system was applied to the calculation of collisionless heating in capacitively and inductively coupled plasmas. In particular, the importance of accounting for the nonuniform plasma density profile for computing the current density profile and the EEDF is demonstrated. The enhancement of collisionless heating due to the bounce resonance between the electron motion in the potential well and the external radio-frequency electric field is investigated. It is shown that a nonlinear and self-consistent treatment is necessary for the correct description of collisionless heating.

- Authors:

- Publication Date:

- Research Org.:
- Princeton Plasma Physics Laboratory, NJ (US)

- Sponsoring Org.:
- USDOE Office of Science (SC) (US)

- OSTI Identifier:
- 821522

- Report Number(s):
- PPPL-3922

TRN: US0400820

- DOE Contract Number:
- AC02-76CH03073

- Resource Type:
- Technical Report

- Resource Relation:
- Other Information: PBD: 30 Jan 2004

- Country of Publication:
- United States

- Language:
- English

- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLLISIONLESS PLASMA; CURRENT DENSITY; ELECTRIC FIELDS; ELECTRONS; ENERGY SPECTRA; HEATING; KINETIC EQUATIONS; KINETICS; LANDAU DAMPING; MEAN FREE PATH; PLASMA DENSITY; RESONANCE; SKIN EFFECT; KINETIC THEORY; RF HEATING

### Citation Formats

```
Igor D. Kaganovich, Oleg V. Polomarov, and Constantine E. Theodosiou.
```*Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating*. United States: N. p., 2004.
Web. doi:10.2172/821522.

```
Igor D. Kaganovich, Oleg V. Polomarov, & Constantine E. Theodosiou.
```*Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating*. United States. doi:10.2172/821522.

```
Igor D. Kaganovich, Oleg V. Polomarov, and Constantine E. Theodosiou. Fri .
"Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating". United States.
doi:10.2172/821522. https://www.osti.gov/servlets/purl/821522.
```

```
@article{osti_821522,
```

title = {Landau Damping and Anomalous Skin Effect in Low-pressure Gas Discharges: Self-consistent Treatment of Collisionless Heating},

author = {Igor D. Kaganovich and Oleg V. Polomarov and Constantine E. Theodosiou},

abstractNote = {In low-pressure discharges, where the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the non-Maxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equations for the kinetic description of nonlocal, nonuniform, nearly collisionless plasmas of low-pressure discharges is reported. It consists of the nonlocal conductivity operator and the averaged kinetic equation for calculation of the non-Maxwellian EEDF. This system was applied to the calculation of collisionless heating in capacitively and inductively coupled plasmas. In particular, the importance of accounting for the nonuniform plasma density profile for computing the current density profile and the EEDF is demonstrated. The enhancement of collisionless heating due to the bounce resonance between the electron motion in the potential well and the external radio-frequency electric field is investigated. It is shown that a nonlinear and self-consistent treatment is necessary for the correct description of collisionless heating.},

doi = {10.2172/821522},

journal = {},

number = ,

volume = ,

place = {United States},

year = {Fri Jan 30 00:00:00 EST 2004},

month = {Fri Jan 30 00:00:00 EST 2004}

}