Fabrication of MEMS components based on ultrananocrystalline diamond thin films and characterization of mechanical properties.

Conference · Wed Jan 31 00:00:00 EST 2001

OSTI ID:813776

Sumant, A V; Auciello, O; Krauss, A R; Gruen, D M; Ersoy, D; Tucek, J; Jayatissa, A; Stach, E; Moldovan, N; Mancini, D; Busmann, H G; Meyer, E M

No abstract prepared.

• Research Organization: Argonne National Lab., IL (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: W-31-109-ENG-38
• OSTI ID: 813776
• Report Number(s): ANL/MSD/CP-104005; TRN: US200316%%516
• Resource Relation: Conference: Materials Research Society Fall 2000, Boston, MA (US), 11/27/2000--12/01/2000; Other Information: PBD: 31 Jan 2001
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
36 MATERIALS SCIENCE
DIAMONDS
FABRICATION
MECHANICAL PROPERTIES
THIN FILMS
MINIATURIZATION
INTEGRATED CIRCUITS