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Title: High-resolution soft x-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
800316
Report Number(s):
LBNL/ALS-29490
TRN: US0202542
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Journal Article
Journal Name:
Japanese Journal of Applied Physics, Part 1: Reg. Papers, Sh. Notes & Rev. Paper
Additional Journal Information:
Journal Volume: 38; Journal Issue: N9A; Other Information: Journal Publication Date: September 1999; PBD: 1 Sep 1999
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; ADVANCED LIGHT SOURCE; CARBON NITRIDES; ELECTRON CYCLOTRON-RESONANCE; EMISSION SPECTRA; SPUTTERING; ADVANCED LIGHT SOURCE ALS

Citation Formats

Muramatsu, Yasuji, Tani, Y., Aoi, Y., Kaneyoshi, T., Motoyama, M., Delaunay, J.J., Hayashi, Takayoshi, Grush, M., Callcott, T.A., and Ederer, D.L. High-resolution soft x-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering. United States: N. p., 1999. Web. doi:10.1143/JJAP.38.5143.
Muramatsu, Yasuji, Tani, Y., Aoi, Y., Kaneyoshi, T., Motoyama, M., Delaunay, J.J., Hayashi, Takayoshi, Grush, M., Callcott, T.A., & Ederer, D.L. High-resolution soft x-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering. United States. doi:10.1143/JJAP.38.5143.
Muramatsu, Yasuji, Tani, Y., Aoi, Y., Kaneyoshi, T., Motoyama, M., Delaunay, J.J., Hayashi, Takayoshi, Grush, M., Callcott, T.A., and Ederer, D.L. Wed . "High-resolution soft x-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering". United States. doi:10.1143/JJAP.38.5143.
@article{osti_800316,
title = {High-resolution soft x-ray emission spectra of crystalline carbon nitride films deposited by electron cyclotron resonance sputtering},
author = {Muramatsu, Yasuji and Tani, Y. and Aoi, Y. and Kaneyoshi, T. and Motoyama, M. and Delaunay, J.J. and Hayashi, Takayoshi and Grush, M. and Callcott, T.A. and Ederer, D.L.},
abstractNote = {No abstract prepared.},
doi = {10.1143/JJAP.38.5143},
journal = {Japanese Journal of Applied Physics, Part 1: Reg. Papers, Sh. Notes & Rev. Paper},
number = N9A,
volume = 38,
place = {United States},
year = {1999},
month = {9}
}