Multilayer coating and test of the optics for two new 10* microstepper extreme-ultraviolet lithography cameras

Journal Article · Sat Jul 01 00:00:00 EDT 2000 · Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures

OSTI ID:800193

Montcalm, Claude; Spiller, Eberhard A; Weber, Frank J; Wedowski, Marco; Folta, J A; Gullikson, Eric M

No abstract prepared.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 800193
• Report Number(s): LBNL/ALS-13663; TRN: US0202436
• Journal Information: Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures, Vol. 19, Issue 4; Other Information: Journal Publication Date: July 2000; PBD: 1 Jul 2000
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
CAMERAS
COATINGS
OPTICS
ADVANCED LIGHT SOURCE ALS