skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Nonspecular scattering from extreme ultraviolet multilayer coatings

Abstract

No abstract prepared.

Authors:
;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
800101
Report Number(s):
LBNL/ALS-12855
TRN: US0202349
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Journal Article
Journal Name:
Physica B: Condensed Matter (Amsterdam)
Additional Journal Information:
Journal Volume: 283; Journal Issue: 1-3; Other Information: Journal Publication Date: June 2000; PBD: 1 Jun 2000
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; ADVANCED LIGHT SOURCE; COATINGS; SCATTERING; ADVANCED LIGHT SOURCE ALS

Citation Formats

Stearns, D.G., and Gullikson, Eric M. Nonspecular scattering from extreme ultraviolet multilayer coatings. United States: N. p., 2000. Web. doi:10.1016/S0921-4526(99)01897-9.
Stearns, D.G., & Gullikson, Eric M. Nonspecular scattering from extreme ultraviolet multilayer coatings. United States. doi:10.1016/S0921-4526(99)01897-9.
Stearns, D.G., and Gullikson, Eric M. Thu . "Nonspecular scattering from extreme ultraviolet multilayer coatings". United States. doi:10.1016/S0921-4526(99)01897-9.
@article{osti_800101,
title = {Nonspecular scattering from extreme ultraviolet multilayer coatings},
author = {Stearns, D.G. and Gullikson, Eric M.},
abstractNote = {No abstract prepared.},
doi = {10.1016/S0921-4526(99)01897-9},
journal = {Physica B: Condensed Matter (Amsterdam)},
number = 1-3,
volume = 283,
place = {United States},
year = {2000},
month = {6}
}