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Title: The PS/PDI: a high accuracy development tool for diffraction limited short-wavelength optics

Conference ·
OSTI ID:798295

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
798295
Report Number(s):
LBNL/ALS-12832; TRN: US0204157
Resource Relation:
Conference: 6th International Conference of the X-ray Microscopy, Berkeley, CA (US), 08/01/1999--08/06/1999; Other Information: PBD: 1 Aug 1999
Country of Publication:
United States
Language:
English