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Title: Optimal dynamic performance for high-precision actuators/stages.

Abstract

System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.

Authors:
; ; ;
Publication Date:
Research Org.:
Argonne National Lab., IL (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
797927
Report Number(s):
ANL/XFD/CP-108102
Journal ID: ISSN 0277-786X; TRN: US200218%%112
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Conference
Resource Relation:
Journal Volume: 4771; Conference: SPIE, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 3 Jul 2002
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; OPTICAL EQUIPMENT; ACTUATORS; PERFORMANCE; DEGREES OF FREEDOM; COMPUTERIZED SIMULATION

Citation Formats

Preissner, C, Lee, S -H, Royston, T J, and Shu, D. Optimal dynamic performance for high-precision actuators/stages.. United States: N. p., 2002. Web. doi:10.1117/12.482149.
Preissner, C, Lee, S -H, Royston, T J, & Shu, D. Optimal dynamic performance for high-precision actuators/stages.. United States. doi:10.1117/12.482149.
Preissner, C, Lee, S -H, Royston, T J, and Shu, D. Wed . "Optimal dynamic performance for high-precision actuators/stages.". United States. doi:10.1117/12.482149. https://www.osti.gov/servlets/purl/797927.
@article{osti_797927,
title = {Optimal dynamic performance for high-precision actuators/stages.},
author = {Preissner, C and Lee, S -H and Royston, T J and Shu, D},
abstractNote = {System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.},
doi = {10.1117/12.482149},
journal = {},
issn = {0277-786X},
number = ,
volume = 4771,
place = {United States},
year = {2002},
month = {7}
}

Conference:
Other availability
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