Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems
Abstract
No abstract prepared.
- Authors:
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Org.:
- USDOE Office of Energy Research (ER) (US)
- OSTI Identifier:
- 796517
- DOE Contract Number:
- AC02-98CH10886
- Resource Type:
- Journal Article
- Journal Name:
- Thin Solid Films
- Additional Journal Information:
- Journal Volume: 391; Other Information: PBD: 13 Mar 2001; Journal ID: ISSN 0040-6090
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; ANNEALING; KINETICS; ALUMINIUM; TITANIUM NITRIDES; MEMBRANES; EPITAXY; INTERFACES; NATIONAL SYNCHROTRON LIGHT SOURCE
Citation Formats
Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, and Cabral, Jr, C. Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems. United States: N. p., 2001.
Web. doi:10.1016/S0040-6090(01)00938-5.
Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, & Cabral, Jr, C. Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems. United States. https://doi.org/10.1016/S0040-6090(01)00938-5
Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, and Cabral, Jr, C. 2001.
"Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems". United States. https://doi.org/10.1016/S0040-6090(01)00938-5.
@article{osti_796517,
title = {Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems},
author = {Chun, J and Desjardins, P and Petrov, I and Greene, J and Lavoie, C and Cabral, Jr, C},
abstractNote = {No abstract prepared.},
doi = {10.1016/S0040-6090(01)00938-5},
url = {https://www.osti.gov/biblio/796517},
journal = {Thin Solid Films},
issn = {0040-6090},
number = ,
volume = 391,
place = {United States},
year = {Tue Mar 13 00:00:00 EST 2001},
month = {Tue Mar 13 00:00:00 EST 2001}
}
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