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Title: Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems

Abstract

No abstract prepared.

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
Sponsoring Org.:
USDOE Office of Energy Research (ER) (US)
OSTI Identifier:
796517
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Journal Article
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 391; Other Information: PBD: 13 Mar 2001; Journal ID: ISSN 0040-6090
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; KINETICS; ALUMINIUM; TITANIUM NITRIDES; MEMBRANES; EPITAXY; INTERFACES; NATIONAL SYNCHROTRON LIGHT SOURCE

Citation Formats

Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, and Cabral, Jr, C. Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems. United States: N. p., 2001. Web. doi:10.1016/S0040-6090(01)00938-5.
Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, & Cabral, Jr, C. Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems. United States. https://doi.org/10.1016/S0040-6090(01)00938-5
Chun, J, Desjardins, P, Petrov, I, Greene, J, Lavoie, C, and Cabral, Jr, C. 2001. "Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems". United States. https://doi.org/10.1016/S0040-6090(01)00938-5.
@article{osti_796517,
title = {Interfacial Reaction Pathways and Kinetics During Annealing of Epitaxial Al/TiN(001) Model Diffusion Barrier Systems},
author = {Chun, J and Desjardins, P and Petrov, I and Greene, J and Lavoie, C and Cabral, Jr, C},
abstractNote = {No abstract prepared.},
doi = {10.1016/S0040-6090(01)00938-5},
url = {https://www.osti.gov/biblio/796517}, journal = {Thin Solid Films},
issn = {0040-6090},
number = ,
volume = 391,
place = {United States},
year = {Tue Mar 13 00:00:00 EST 2001},
month = {Tue Mar 13 00:00:00 EST 2001}
}