Correlation of Chemisorption and Electronic Effects for Metal Oxide Interfaces: Transducing Principles for Temperature Programmed Gas Microsensors (Final Report)

Technical Report · Fri Dec 21 00:00:00 EST 2001

DOI:https://doi.org/10.2172/793127· OSTI ID:793127

Semancik, S; Cavicchi, R E; DeVoe, D L; McAvoy, T J ^[1]

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1. National Institute of Standards and Technology (US)

This Final Report describes efforts and results for a 3-year DoE/OST-EMSP project centered at NIST. The multidisciplinary project investigated scientific and technical concepts critical for developing tunable, MEMS-based, gas and vapor microsensors that could be applied for monitoring the types of multiple analytes (and differing backgrounds) encountered at DoE waste sites. Micromachined ''microhotplate'' arrays were used as platforms for fabricating conductometric sensor prototypes, and as microscale research tools. Efficient microarray techniques were developed for locally depositing and then performance evaluating thin oxide films, in order to correlate gas sensing characteristics with properties including composition, microstructure, thickness and surface modification. This approach produced temperature-dependent databases on the sensitivities of sensing materials to varied analytes (in air) which enable application-specific tuning of microsensor arrays. Mechanistic studies on adsorb ate transient phenomena were conducted to better understand the ways in which rapid temperature programming schedules can be used to produce unique response signatures and increase information density in microsensor signals. Chemometric and neural network analyses were also employed in our studies for recognition and quantification of target analytes.

• Research Organization: National Institute of Standards and Technology (US)
• Sponsoring Organization: USDOE Office of Environmental Management (EM); EM-50 (US)
• DOE Contract Number: AI07-98ER62709
• OSTI ID: 793127
• Resource Relation: Other Information: PBD: 21 Dec 2001
• Country of Publication: United States
• Language: English

Related Subjects

12 MANAGEMENT OF RADIOACTIVE WASTES, AND NON-RADIOACTIVE WASTES FROM NUCLEAR FACILITIES
36 MATERIALS SCIENCE
54 ENVIRONMENTAL SCIENCES
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
CHEMISORPTION
MICROSTRUCTURE
MONITORING
NEURAL NETWORKS
OXIDES
PROGRAMMING
SCHEDULES
TARGETS
THICKNESS
TRANSIENTS
TUNING
WASTES
ADSORBATE TRANSIENTS
ADSORPTION
CHEMICAL VAPOR DEPOSITION
CHEMOMETRICS
COMBINATORIAL SCIENCE
CROSSTALK
DESORPTION
ELECTRICAL CONDUCTANCE
GAS MICROSENSOR
MEMS
METAL OXIDE
METALS
MICROARRAYS
MICROHOTPLATE
MICROMACHINING
NANOPARTICLE
SILICON
SURFACE ELECTRONICS
TEMPERATURE PROGAMMING
THIN FILMS
VOLATILE ORGANICS