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Title: Experimental analysis of high-resolution soft x-ray microscopy

Abstract

The soft x-ray, full-field microscope XM-1 at Lawrence Berkeley National Laboratory's (LBNL) Advanced Light Source has already demonstrated its capability to resolve 25-nm features. This was accomplished using a micro zone plate (MZP) with an outer zone width of 25 nm. Limited by the aspect ratio of the resist used in the fabrication, the gold-plating thickness of that zone plate is around 40 nm. However, some applications, in particular, biological imaging, prefer improved efficiency, which can be achieved by high-aspect-ratio zone plates. We accomplish this by using a bilayer-resist process in the zone plate fabrication. As our first attempt, a 40-nm-outer-zone-width MZP with a nickel-plating thickness of 150 nm (aspect ratio of 4:1) was successfully fabricated. Relative to the 25-nm MZP, this zone plate is ten times more efficient. Using this high-efficiency MZP, a line test pattern with half period of 30 nm is resolved by the microscope at photon energy of 500 eV. Furthermore, with a new multilayer mirror, the XM-1 can now perform imaging up to 1.8 keV. An image of a line test pattern with half period of 40 nm has a measured modulation of 90%. The image was taken at 1.77 keV with the high-efficiency MZPmore » with an outer zone width of 35 nm and a nickel-plating thickness of 180 nm (aspect ratio of 5:1). XM-1 provides a gateway to high-resolution imaging at high energy. To measure frequency response of the XM-1, a partially annealed gold ''island'' pattern was chosen as a test object. After comparison with the SEM image of the pattern, the microscope has the measured cutoff of 19 nm, close to the theoretical one of 17 nm. The normalized frequency response, which is the ratio of the power density of the soft x-ray image to that of the SEM image, is shown in this paper.« less

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (US)
OSTI Identifier:
790017
Report Number(s):
LBNL-48906
R&D Project: 509201; TRN: US0200331
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Conference
Resource Relation:
Conference: 46th Annual Meeting International Symposium on Optical Science and Technology, San Diego, CA (US), 07/29/2001--08/03/2001; Other Information: PBD: 6 Sep 2001
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ADVANCED LIGHT SOURCE; SOFT X RADIATION; MICROSCOPES; SPATIAL RESOLUTION; PERFORMANCE

Citation Formats

Chao, Weilun, Anderson, Erik H., Denbeaux, Gregory, Harteneck, Bruce, Pearson, Angelic L., Olynick, Deirdre, Schneider, Gerd, and Attwood, David. Experimental analysis of high-resolution soft x-ray microscopy. United States: N. p., 2001. Web.
Chao, Weilun, Anderson, Erik H., Denbeaux, Gregory, Harteneck, Bruce, Pearson, Angelic L., Olynick, Deirdre, Schneider, Gerd, & Attwood, David. Experimental analysis of high-resolution soft x-ray microscopy. United States.
Chao, Weilun, Anderson, Erik H., Denbeaux, Gregory, Harteneck, Bruce, Pearson, Angelic L., Olynick, Deirdre, Schneider, Gerd, and Attwood, David. Thu . "Experimental analysis of high-resolution soft x-ray microscopy". United States. doi:. https://www.osti.gov/servlets/purl/790017.
@article{osti_790017,
title = {Experimental analysis of high-resolution soft x-ray microscopy},
author = {Chao, Weilun and Anderson, Erik H. and Denbeaux, Gregory and Harteneck, Bruce and Pearson, Angelic L. and Olynick, Deirdre and Schneider, Gerd and Attwood, David},
abstractNote = {The soft x-ray, full-field microscope XM-1 at Lawrence Berkeley National Laboratory's (LBNL) Advanced Light Source has already demonstrated its capability to resolve 25-nm features. This was accomplished using a micro zone plate (MZP) with an outer zone width of 25 nm. Limited by the aspect ratio of the resist used in the fabrication, the gold-plating thickness of that zone plate is around 40 nm. However, some applications, in particular, biological imaging, prefer improved efficiency, which can be achieved by high-aspect-ratio zone plates. We accomplish this by using a bilayer-resist process in the zone plate fabrication. As our first attempt, a 40-nm-outer-zone-width MZP with a nickel-plating thickness of 150 nm (aspect ratio of 4:1) was successfully fabricated. Relative to the 25-nm MZP, this zone plate is ten times more efficient. Using this high-efficiency MZP, a line test pattern with half period of 30 nm is resolved by the microscope at photon energy of 500 eV. Furthermore, with a new multilayer mirror, the XM-1 can now perform imaging up to 1.8 keV. An image of a line test pattern with half period of 40 nm has a measured modulation of 90%. The image was taken at 1.77 keV with the high-efficiency MZP with an outer zone width of 35 nm and a nickel-plating thickness of 180 nm (aspect ratio of 5:1). XM-1 provides a gateway to high-resolution imaging at high energy. To measure frequency response of the XM-1, a partially annealed gold ''island'' pattern was chosen as a test object. After comparison with the SEM image of the pattern, the microscope has the measured cutoff of 19 nm, close to the theoretical one of 17 nm. The normalized frequency response, which is the ratio of the power density of the soft x-ray image to that of the SEM image, is shown in this paper.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Sep 06 00:00:00 EDT 2001},
month = {Thu Sep 06 00:00:00 EDT 2001}
}

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