Fabrication of Integrated Diffractive Micro-Optics for MEMS Applications
We investigated the fabrication of integrated diffractive micro-optical features on MEMS structures for the purpose of motion detection. The process of producing the diffractive features and the MEMS structures by focused ion beam milling is described in detail, as is the ion beam sputtering process used to produce coatings on these structures. The diffractive features of the circular Fresnel zone plate (FZP) and spiral FZP were fabricated on MEMS structures and the relevant diffraction theory is discussed. The spiral FZP diffractive features produced well defined foci whose intensity varies with distance from the FZP. Observation of these intensity variations enabled us to detect the motion of the MEMS structure, and the resulting device was used to scan an IR image of a hot object.
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- US Department of Defense (US)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 788513
- Report Number(s):
- P01-111533; TRN: US200201%%222
- Resource Relation:
- Conference: SPIE's 46th Annual Meeting, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 10 Aug 2001
- Country of Publication:
- United States
- Language:
- English
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