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Title: ACCURATE HYDROGEN DEPTH PROFILING BY REFLECTION ELASTIC RECOIL DETECTION ANALYSIS

Abstract

No abstract prepared.

Authors:
; ;
Publication Date:
Research Org.:
Los Alamos National Lab., NM (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
783578
Report Number(s):
LA-UR-01-3955
TRN: US200207%%133
DOE Contract Number:
W-7405-ENG-36
Resource Type:
Conference
Resource Relation:
Conference: Conference title not supplied, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 1 Jul 2001
Country of Publication:
United States
Language:
English
Subject:
08 HYDROGEN; 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DETECTION; HYDROGEN; REFLECTION

Citation Formats

R. D. VERDA, J. R. TESMER, and ET AL. ACCURATE HYDROGEN DEPTH PROFILING BY REFLECTION ELASTIC RECOIL DETECTION ANALYSIS. United States: N. p., 2001. Web.
R. D. VERDA, J. R. TESMER, & ET AL. ACCURATE HYDROGEN DEPTH PROFILING BY REFLECTION ELASTIC RECOIL DETECTION ANALYSIS. United States.
R. D. VERDA, J. R. TESMER, and ET AL. Sun . "ACCURATE HYDROGEN DEPTH PROFILING BY REFLECTION ELASTIC RECOIL DETECTION ANALYSIS". United States. doi:. https://www.osti.gov/servlets/purl/783578.
@article{osti_783578,
title = {ACCURATE HYDROGEN DEPTH PROFILING BY REFLECTION ELASTIC RECOIL DETECTION ANALYSIS},
author = {R. D. VERDA and J. R. TESMER and ET AL},
abstractNote = {No abstract prepared.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jul 01 00:00:00 EDT 2001},
month = {Sun Jul 01 00:00:00 EDT 2001}
}

Conference:
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  • A technique to convert reflection elastic recoil detection analysis spectra to depth profiles, the channel-depth conversion, was introduced by Verda, et al [1]. But the channel-depth conversion does not correct for energy spread, the unwanted broadening in the energy of the spectra, which can lead to errors in depth profiling. A work in progress introduces a technique that corrects for energy spread in elastic recoil detection analysis spectra, the energy spread correction [2]. Together, the energy spread correction and the channel-depth conversion comprise an accurate and convenient hydrogen depth profiling method.
  • The elastic recoil detection (ERD) analysis technique for H profiling in the near surface regions of solids is described. ERD is shown to have the capability of detecting H and its isotopes down to concentrations of approx. 0.01 at. % with a depth resolution of a few hundred angstroms. Is is demonstrated that 2.4-MeV He ions can be used successfully to profile /sup 1/H and /sup 2/D using this technique. 12 figures.
  • Silicon and helium elastic recoil detection (ERD) have been used to obtain concentration versus depth profiles of hydrogen (/sup 1/H) and deuterium (/sup 2/H) in polymers. Using helium ERD, a depth resolution of 100nm was achieved in polystyrene, whereas 30nm was achieved using silicon ERD. Polymers are in general susceptible to radiation damage and precautions are necessary in order to minimize this. These precautions are addressed. When helium ERD is used to obtain the yield versus energy profile, the conversion of this profile to one of concentration versus depth is relatively straightforward since the scattering cross sections for collisions betweenmore » helium and /sup 1/H or /sup 2/H nuclei are independent of energy over typical incident energy ranges (2.3--3.0 MeV) used in these studies. With the use of silicon ions, corrections for the energy dependence of the scattering cross section must also be made. A comparison of helium ERD measurements of diffusion in polymer systems is made with those obtained using other techniques. The agreement is excellent. 31 refs., 10 figs., 2 tabs.« less
  • Depth profiles of hydrogen in a set of boron-doped diamond films were studied by a convolution method to simulate the recoil proton spectra induced by {sup 4}He ions of 3 MeV. Results show that the hydrogen depth profiles in these varying-level boron-doped diamond films exhibit a similar three-layer structure: the surface absorption layer, the diffusion region, and the uniform hydrogen-containing matrix. Hydrogen concentrations at all the layers, especially in the surface layer, are found to increase significantly with the boron-doping concentration, implying that more dangling-bonds and/or CH-bonds were introduced by the boron-doping process. While the increased dangling-bonds and/or CH-bonds degrademore » the microstructure of the diamond films as observed by Raman Shift, the boron-doping significantly reduces the specific resistance and makes semiconducting diamond films possible. Hydrogen mobility (or hydrogen loss) in these films as a result of the {sup 4}He beam irradiation was also observed and discussed.« less
  • Recoil atoms detected in Elastic Recoil Detection (ERD) experiments emerge from an initial collision area along cones of constant energy due to the cylindrical symmetry of the elastic scattering cross section. The constant energy cones therefore intercept planar slit plates placed before the detectors in conic sections. For ease of fabrication slits are typically configured as long narrow rectangles, and as a result energy resolution is adversely affected. It has been shown that the kinematic broadening caused by using rectangular slits is minimized when L = 2 (W z tan/Theta//sub recoil/)/sup 1/2/ where W is the slit width, L ismore » the slit length, z is the slit-target distance and /Theta//sub recoil/ is the lab-frame recoil angle. The improved energy resolution which results when rectangular slits are replaced by appropriate curved slits is examined here. Formulas are given for the conic sections associated with the curved slits as a function of experimental geometry. When slit dimensions are small compared with the full extent of the conic section slit geometry can be accurately approximated as the arc of a circle with radius R/sub c/ = z tan/Theta//sub recoil/. Energy loss effects on the resolution are also accounted for in our treatment. The use of curved slits with L = 4 (W z tan/Theta//sub recoil/)/sup 1/2/ is shown to improve kinematic broadening by /approximately/50% as compared to optimized rectangular slits of the same area. 2 refs., 5 figs.« less