Novel use of gas jet plasma to prepare a-Si:H alloy. Phase II final report for period July 15, 1997 - September 30, 1999
Technical Report
·
OSTI ID:771300
- Research Organization:
- Energy Conversion Devices, Inc., Troy, MI (US)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-96ER82162
- OSTI ID:
- 771300
- Type / Phase:
- SBIR
- Report Number(s):
- DOE/ER/82162-1
- Country of Publication:
- United States
- Language:
- English
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