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Title: Increased medium-range order in amorphous silicon with increased substrate temperature

Abstract

Using fluctuation electron microscopy, the authors have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. They find a smooth increase in the medium-range order of the samples, which they interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab., IL (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
761273
Report Number(s):
ANL/MSD/CP-102632
TRN: AH200032%%112
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Conference
Resource Relation:
Conference: 8th International Conference on the Structure of Non-Crystalline Materials, Aberystwyth (GB), 08/06/2000--08/11/2000; Other Information: PBD: 15 Aug 2000
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ORDER PARAMETERS; SILICON; SUBSTRATES; THIN FILMS; AMORPHOUS STATE; TEMPERATURE DEPENDENCE; PHASE TRANSFORMATIONS; POLYCRYSTALS

Citation Formats

Voyles, P M, Gerbi, J E, Treacy, M M. J., Gibson, J M, and Aberlson, J R. Increased medium-range order in amorphous silicon with increased substrate temperature. United States: N. p., 2000. Web.
Voyles, P M, Gerbi, J E, Treacy, M M. J., Gibson, J M, & Aberlson, J R. Increased medium-range order in amorphous silicon with increased substrate temperature. United States.
Voyles, P M, Gerbi, J E, Treacy, M M. J., Gibson, J M, and Aberlson, J R. Tue . "Increased medium-range order in amorphous silicon with increased substrate temperature". United States. https://www.osti.gov/servlets/purl/761273.
@article{osti_761273,
title = {Increased medium-range order in amorphous silicon with increased substrate temperature},
author = {Voyles, P M and Gerbi, J E and Treacy, M M. J. and Gibson, J M and Aberlson, J R},
abstractNote = {Using fluctuation electron microscopy, the authors have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. They find a smooth increase in the medium-range order of the samples, which they interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.},
doi = {},
url = {https://www.osti.gov/biblio/761273}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {8}
}

Conference:
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