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Title: MECHANICAL TESTING OF EPON SU-8 WITH SIEM

Abstract

High aspect ratio structures are often present in MEMS devices and EPON SU-8 is often used to produce such structures because of its low cost. It is essential to know the mechanical properties of SU-8 for producing reliable MEMS products. However, the mechanical properties of SU-8 may depend on the manufacturing process and the size of the structure, which is in the micron domain. Hence, one needs to test specimens that are similar in size to MEMS structures to determine if the mechanical properties change with processing protocol. In this work, the authors applied the newly developed technique SIEM (Speckle Interferometry with Electron Microscopy) to the determination of SU-8's mechanical properties.

Authors:
; ;
Publication Date:
Research Org.:
Brookhaven National Lab., Upton, NY (US)
Sponsoring Org.:
USDOE Office of Energy Research (ER) (US)
OSTI Identifier:
759049
Report Number(s):
BNL-67531; KA0404
R&D Project: PO24; KA0404; TRN: AH200035%%40
DOE Contract Number:  
AC02-98CH10886
Resource Type:
Conference
Resource Relation:
Conference: MICROSCALE SYSTEMS: MECHANICS AND MEASUREMENTS SYMPOSIUM, ORLANDO, FL (US), 06/08/2000--06/08/2000; Other Information: PBD: 8 Jun 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ELECTRONIC CIRCUITS; MINIATURIZATION; ASPECT RATIO; MECHANICAL PROPERTIES; ALLOYS; INTERFEROMETRY; ELECTRON MICROSCOPY

Citation Formats

CHANG,S., WARREN,J., and CHIANG,F.P. MECHANICAL TESTING OF EPON SU-8 WITH SIEM. United States: N. p., 2000. Web.
CHANG,S., WARREN,J., & CHIANG,F.P. MECHANICAL TESTING OF EPON SU-8 WITH SIEM. United States.
CHANG,S., WARREN,J., and CHIANG,F.P. Thu . "MECHANICAL TESTING OF EPON SU-8 WITH SIEM". United States. https://www.osti.gov/servlets/purl/759049.
@article{osti_759049,
title = {MECHANICAL TESTING OF EPON SU-8 WITH SIEM},
author = {CHANG,S. and WARREN,J. and CHIANG,F.P.},
abstractNote = {High aspect ratio structures are often present in MEMS devices and EPON SU-8 is often used to produce such structures because of its low cost. It is essential to know the mechanical properties of SU-8 for producing reliable MEMS products. However, the mechanical properties of SU-8 may depend on the manufacturing process and the size of the structure, which is in the micron domain. Hence, one needs to test specimens that are similar in size to MEMS structures to determine if the mechanical properties change with processing protocol. In this work, the authors applied the newly developed technique SIEM (Speckle Interferometry with Electron Microscopy) to the determination of SU-8's mechanical properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {6}
}

Conference:
Other availability
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