The Polychromator: A programmable MEMS diffraction grating for synthetic spectra
The authors report here the design, fabrication and demonstration of an electrostatically actuated MEMS diffractive optical device, the Polychromator grating. The Polychromator grating enables a new type of correlation spectrometer for remote detection of a wide range of chemical species, offering electronic programmability, high specificity and sensitivity, fast response and ruggedness. Significant results include: (1) The first demonstrations of user-defined synthetic spectra in the 3-5 {micro}m wavelength regime based upon controlled deflection of individual grating elements in the Polychromator grating; (2) The first demonstration of gas detection by correlation spectroscopy using synthetic spectra generated by the Polychromator grating.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 756074
- Report Number(s):
- SAND2000-0975C; TRN: AH200021%%112
- Resource Relation:
- Conference: Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC (US), 06/04/2000--06/08/2000; Other Information: PBD: 17 Apr 2000
- Country of Publication:
- United States
- Language:
- English
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