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Title: Comparison of fabrication approaches for selectively oxidized VCSEL arrays

Abstract

The impressive performance improvements of laterally oxidized VCSELs come at the expense of increased fabrication complexity for 2-dimensional arrays. Since the epitaxial layers to be wet-thermally oxidized must be exposed, non-planarity can be an issue. This is particularly important in that electrical contact to both the anode and cathode of the diode must be brought out to a package. They have investigated four fabrication sequences suitable for the fabrication of 2-dimensional VCSEL arrays. These techniques include: mesa etched polymer planarized, mesa etched bridge contacted, mesa etched oxide isolated (where the electrical trace is isolated from the substrate during the oxidation) and oxide/implant isolation (oxidation through small via holes) all of which result in VCSELs with outstanding performance. The suitability of these processes for manufacturing are assessed relative to oxidation uniformity, device capacitance, and structural ruggedness for packaging.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
754343
Report Number(s):
SAND2000-0121C; 0000034282-000
0000034282-000; TRN: AH200016%%232
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: National Conference of Standards Laboratories, Toronto, Ontario (CA), 07/16/2000--07/20/2000; Other Information: PBD: 18 Apr 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS; FABRICATION; OXIDATION; PERFORMANCE; VCSEL; ARRAYS; SELECTIVELY OXIDIZED: FABRICATIONS

Citation Formats

GEIB,KENT M., CHOQUETTE,KENT D., ALLERMAN,ANDREW A., BRIGGS,RONALD D., and HINDI,JANA JO. Comparison of fabrication approaches for selectively oxidized VCSEL arrays. United States: N. p., 2000. Web.
GEIB,KENT M., CHOQUETTE,KENT D., ALLERMAN,ANDREW A., BRIGGS,RONALD D., & HINDI,JANA JO. Comparison of fabrication approaches for selectively oxidized VCSEL arrays. United States.
GEIB,KENT M., CHOQUETTE,KENT D., ALLERMAN,ANDREW A., BRIGGS,RONALD D., and HINDI,JANA JO. 2000. "Comparison of fabrication approaches for selectively oxidized VCSEL arrays". United States. doi:. https://www.osti.gov/servlets/purl/754343.
@article{osti_754343,
title = {Comparison of fabrication approaches for selectively oxidized VCSEL arrays},
author = {GEIB,KENT M. and CHOQUETTE,KENT D. and ALLERMAN,ANDREW A. and BRIGGS,RONALD D. and HINDI,JANA JO},
abstractNote = {The impressive performance improvements of laterally oxidized VCSELs come at the expense of increased fabrication complexity for 2-dimensional arrays. Since the epitaxial layers to be wet-thermally oxidized must be exposed, non-planarity can be an issue. This is particularly important in that electrical contact to both the anode and cathode of the diode must be brought out to a package. They have investigated four fabrication sequences suitable for the fabrication of 2-dimensional VCSEL arrays. These techniques include: mesa etched polymer planarized, mesa etched bridge contacted, mesa etched oxide isolated (where the electrical trace is isolated from the substrate during the oxidation) and oxide/implant isolation (oxidation through small via holes) all of which result in VCSELs with outstanding performance. The suitability of these processes for manufacturing are assessed relative to oxidation uniformity, device capacitance, and structural ruggedness for packaging.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 2000,
month = 4
}

Conference:
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