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Title: Metal Impurity Precipitates in Silicon: Chemical State and Stability

Abstract

No abstract prepared.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences
OSTI Identifier:
751772
Report Number(s):
LBNL-44131
R&D Project: 509201; TRN: US200610%%132
DOE Contract Number:  
DE-AC03-76SF00098
Resource Type:
Conference
Resource Relation:
Conference: 20th International Conference on Defects in Semiconductors, Berkeley, CA, July 26-30, 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL STATE; DEFECTS; SILICON; STABILITY

Citation Formats

McHugo, Scott A., Thompson, A.C., Lamble, G., Flink, C., and Weber, E.R. Metal Impurity Precipitates in Silicon: Chemical State and Stability. United States: N. p., 1999. Web.
McHugo, Scott A., Thompson, A.C., Lamble, G., Flink, C., & Weber, E.R. Metal Impurity Precipitates in Silicon: Chemical State and Stability. United States.
McHugo, Scott A., Thompson, A.C., Lamble, G., Flink, C., and Weber, E.R. Mon . "Metal Impurity Precipitates in Silicon: Chemical State and Stability". United States.
@article{osti_751772,
title = {Metal Impurity Precipitates in Silicon: Chemical State and Stability},
author = {McHugo, Scott A. and Thompson, A.C. and Lamble, G. and Flink, C. and Weber, E.R.},
abstractNote = {No abstract prepared.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {8}
}

Conference:
Other availability
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