Long throw and rotary output electro-thermal actuators based on bent-beam suspensions

Conference · Mon Nov 22 00:00:00 EST 1999

OSTI ID:750206

Park, J S; Chu, L L; Siwapornsathain, E; Oliver, A D; Gianchandani, Y B

This paper reports on significant advances in electrothermal bent beam actuators. Designs for long throw linear and rotary actuators are described. Silicon p++ devices showed 20--30 {mu}m displacements with 150 {micro}N loads at actuation levels of 6--8 V, and 250--300 mW. An electroplated version provided 15 {mu}m displacements at 0.8 V and 450 mW. Inchworm type devices are reported that had linear displacements of 100 {micro}m with 200 {micro}N loads. Refinements in the modeling to account for non-linear thermal expansion coefficients and buckling are also reported.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 750206
• Report Number(s): SAND99-3007C; TRN: AH200007%%74
• Resource Relation: Conference: MEMS 2000, Miyazaki (JP), 01/23/2000--01/27/2000; Other Information: PBD: 22 Nov 1999
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ACTUATORS
NONLINEAR PROBLEMS
THERMAL EXPANSION
DEFORMATION
DESIGN
MATHEMATICAL MODELS