Apparatus for producing a scanning laser beam of constant linear velocity
The invention discloses an apparatus for producing a single scanning beam of radiant energy comprising (1) a source of radiant energy producing a single narrow collimated beam; (2) a uniformly rotating reflecting surface for reflecting the beam to produce a single angularly-scanned input beam of uniform angular velocity; and (3) means for converting the single input beam into a linearly-scanning output beam of uniform linear velocity, the means comprising a lens which satisfies the relationship h =k.theta where h is the distance between the center of the output beam and the optical axis of the lens, k is a constant very nearly equal to the focal length of the lens and theta is the angle between the center of said input beam and the optical axis of said lens.
- Assignee:
- Zygo Corp.
- Patent Number(s):
- US 3961838
- OSTI ID:
- 7276323
- Country of Publication:
- United States
- Language:
- English
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