Backscattering spectrometry device for identifying unknown elements present in a workpiece

Patent · Tue Oct 22 00:00:00 EDT 1991

OSTI ID:7274277

Doyle, B L; Knapp, J A

This patent describes a backscattering spectrometry method and device for identifying and quantifying impurities in a workpiece during processing and manufacturing of that workpiece. While the workpiece is implanted with an ion beam, that same ion beam backscatters resulting from collisions with known atoms and with impurities within the workpiece. A detector counts the number and measures the energy of the ions which pass through a filter. From the energy determination and knowledge of the scattering angle, a mass calculation determines the identity, and from the number and solid angle of the scattering angle, a relative concentration of the impurity is obtained.

• Assignee: US Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 5059785; A
• Application Number: PPN: US 7-530672; TRN: 92-031391
• OSTI ID: 7274277
• Resource Relation: Patent File Date: 30 May 1990
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
Ta
ION BEAMS
BACKSCATTERING
MATERIALS
PROCESS CONTROL
ENERGY SPECTRA
IMPURITIES
ION IMPLANTATION
MANUFACTURING
ON-LINE MEASUREMENT SYSTEMS
BEAMS
CONTROL
ON-LINE SYSTEMS
SCATTERING
SPECTRA
400101* - Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
665300 - Interactions Between Beams & Condensed Matter- (1992-)
665100 - Nuclear Techniques in Condensed Matter Physics - (1992-)
661220 - Particle Beam Production & Handling
Targets- (1992-)