Method of chemical vapor deposition of boron nitride using polymeric cyanoborane

Patent · Tue Jun 14 00:00:00 EDT 1994

OSTI ID:7198508

Maya, L

Polymeric cyanoborane is volatilized, decomposed by thermal or microwave plasma energy, and deposited on a substrate as an amorphous film containing boron, nitrogen and carbon. Residual carbon present in the film is removed by ammonia treatment at an increased temperature, producing an adherent, essentially stoichiometric boron nitride film. 11 figs.

• DOE Contract Number: AC05-84OR21400
• Assignee: Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
• Patent Number(s): US 5320878; A
• Application Number: PPN: US 7-819688
• OSTI ID: 7198508
• Resource Relation: Patent File Date: 10 Jan 1992
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BORON NITRIDES
CHEMICAL VAPOR DEPOSITION
AMORPHOUS STATE
CHEMICAL COMPOSITION
DECOMPOSITION
BORON COMPOUNDS
CHEMICAL COATING
CHEMICAL REACTIONS
DEPOSITION
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
SURFACE COATING
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication