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Title: Preparation of thin ceramic films via an aqueous solution route

Patent ·
OSTI ID:7173200

This patent describes a method of forming oxide ceramic films. It comprises use of an aqueous solution of soluble metal salts and a low molecular weight amino acid, coating the solution onto a substrate, and pyrolyzing the film.

Assignee:
Battelle Memorial Institute, Richland, WA
Patent Number(s):
US 4880772; A
Application Number:
PPN: US 7-204643A
OSTI ID:
7173200
Resource Relation:
Patent File Date: 9 Jun 1988
Country of Publication:
United States
Language:
English