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Title: Determination of residual stress in Cr-implanted Al sub 2 O sub 3 by glancing angle x-ray diffraction

Abstract

We report x-ray diffraction measurements of residual stress in sapphire crystals implanted with Cr{sup +} ions. Stress is determined by measuring both in-plane and out-of-plane lattice constants. Bragg peak positions are measured to determine average stress, while peak widths are measured to determine its variation. Using angles of incidence close to the critical angle for total external reflection of x rays, we compare measurements confined to within {similar to}2.5 nm of the surface and measurements over the {similar to}80 nm thickness of the implanted region. These x-ray residual stress determinations are consistent with those based on indentation crack length, but were less by a factor of 10 than reports based on cantilever bending.

Authors:
; ;  [1]
  1. Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6118 (United States)
Publication Date:
OSTI Identifier:
7116042
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters; (United States)
Additional Journal Information:
Journal Volume: 60:18; Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM OXIDES; ION IMPLANTATION; CHROMIUM ADDITIONS; COMPRESSION STRENGTH; FLEXURAL STRENGTH; RESIDUAL STRESSES; SAPPHIRE; X-RAY DIFFRACTION; ALLOYS; ALUMINIUM COMPOUNDS; CHALCOGENIDES; CHROMIUM ALLOYS; COHERENT SCATTERING; CORUNDUM; DIFFRACTION; MECHANICAL PROPERTIES; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; SCATTERING; STRESSES; 360203* - Ceramics, Cermets, & Refractories- Mechanical Properties; 360206 - Ceramics, Cermets, & Refractories- Radiation Effects

Citation Formats

Specht, E D, Sparks, C J, and McHargue, C J. Determination of residual stress in Cr-implanted Al sub 2 O sub 3 by glancing angle x-ray diffraction. United States: N. p., 1992. Web. doi:10.1063/1.107060.
Specht, E D, Sparks, C J, & McHargue, C J. Determination of residual stress in Cr-implanted Al sub 2 O sub 3 by glancing angle x-ray diffraction. United States. https://doi.org/10.1063/1.107060
Specht, E D, Sparks, C J, and McHargue, C J. Mon . "Determination of residual stress in Cr-implanted Al sub 2 O sub 3 by glancing angle x-ray diffraction". United States. https://doi.org/10.1063/1.107060.
@article{osti_7116042,
title = {Determination of residual stress in Cr-implanted Al sub 2 O sub 3 by glancing angle x-ray diffraction},
author = {Specht, E D and Sparks, C J and McHargue, C J},
abstractNote = {We report x-ray diffraction measurements of residual stress in sapphire crystals implanted with Cr{sup +} ions. Stress is determined by measuring both in-plane and out-of-plane lattice constants. Bragg peak positions are measured to determine average stress, while peak widths are measured to determine its variation. Using angles of incidence close to the critical angle for total external reflection of x rays, we compare measurements confined to within {similar to}2.5 nm of the surface and measurements over the {similar to}80 nm thickness of the implanted region. These x-ray residual stress determinations are consistent with those based on indentation crack length, but were less by a factor of 10 than reports based on cantilever bending.},
doi = {10.1063/1.107060},
url = {https://www.osti.gov/biblio/7116042}, journal = {Applied Physics Letters; (United States)},
issn = {0003-6951},
number = ,
volume = 60:18,
place = {United States},
year = {1992},
month = {5}
}