Development of an economical electron backscattering diffraction system for an environmental scanning electron microscope
- Department of Nuclear Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States)
- North Campus Electron Microbeam Analysis Laboratory, University of Michigan, Ann Arbor, Michigan 48109 (United States)
A low cost, highly versatile electron backscattering diffraction system has been developed for an ElectroScan E3 Environmental Scanning Electron Microscope (ESEM). A P20 phosphor coated screen is placed in the microscope environment to image electron backscattering diffraction patterns (EBSPs). A CCD TV camera is used to view the patterns through a leaded glass port in the microscope specimen chamber. This system has a spatial resolution approaching 5 [mu]m and yields analyzable patterns at pressures of up to 6 Torr. With minor modifications this system may be adapted to fit any scanning electron microscope. Comparison of analyses of the grain boundary misorientation of a Ni--16Cr--9Fe alloy with this system and by selected area channeling patterns (SACPs), performed in a standard SEM, yielded excellent agreement between the two techniques. Owing to the capability to perform on-line analysis of EBSPs, the EBSP technique required only half the time as the SACP technique. The capabilities of the system are illustrated in a study of the grain boundary character distribution of Ni--16Cr--9Fe following thermomechanical treatment.
- DOE Contract Number:
- FG02-85ER45184
- OSTI ID:
- 7083308
- Journal Information:
- Journal of Materials Research; (United States), Vol. 9:7; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
ELECTRON MICROSCOPES
DESIGN
SCANNING ELECTRON MICROSCOPY
BACKSCATTERING
ALLOYS
COST
ELECTRON DIFFRACTION
GRAIN BOUNDARIES
MICROSTRUCTURE
COHERENT SCATTERING
DIFFRACTION
ELECTRON MICROSCOPY
MICROSCOPES
MICROSCOPY
SCATTERING
440600* - Optical Instrumentation- (1990-)
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies