Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof
An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications is disclosed. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al[sub x]N[sub y]O[sub z] layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al[sub x]N[sub y]O[sub z] layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- GTE Labs. Inc., Waltham, MA (United States)
- Patent Number(s):
- US 4950558; A
- Application Number:
- PPN: US 7-250980
- OSTI ID:
- 7073544
- Resource Relation:
- Patent File Date: 23 Sep 1988
- Country of Publication:
- United States
- Language:
- English
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Process for the deposition of high temperature stress and oxidation resistant coatings on silicon-based substrates
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Related Subjects
36 MATERIALS SCIENCE
ALUMINIUM NITRIDES
CHEMICAL VAPOR DEPOSITION
ALUMINIUM OXIDES
COMPOSITE MATERIALS
CORROSION PROTECTION
PROTECTIVE COATINGS
HEAT ENGINES
SILICON CARBIDES
SILICON NITRIDES
ZIRCONIUM OXIDES
CERAMICS
CORROSION RESISTANCE
LAYERS
ALUMINIUM COMPOUNDS
CARBIDES
CARBON COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COATINGS
DEPOSITION
ENGINES
MATERIALS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
SILICON COMPOUNDS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
330100* - Internal Combustion Engines
330200 - External Combustion Engines
360205 - Ceramics
Cermets
& Refractories- Corrosion & Erosion
360604 - Materials- Corrosion
Erosion
& Degradation