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Title: Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof

Patent ·
OSTI ID:7073544

An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications is disclosed. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al[sub x]N[sub y]O[sub z] layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al[sub x]N[sub y]O[sub z] layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.

DOE Contract Number:
AC05-84OR21400
Assignee:
GTE Labs. Inc., Waltham, MA (United States)
Patent Number(s):
US 4950558; A
Application Number:
PPN: US 7-250980
OSTI ID:
7073544
Resource Relation:
Patent File Date: 23 Sep 1988
Country of Publication:
United States
Language:
English