Detector and energy analyzer for energetic-hydrogen in beams and plasmas
A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies. 4 figs.
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 4782302; A
- Application Number:
- PPN: US 6-925590
- OSTI ID:
- 7068106
- Resource Relation:
- Patent File Date: 31 Oct 1986
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
BEAM ANALYZERS
HYDROGEN
DETECTION
HYDROGEN ISOTOPES
PLASMA DIAGNOSTICS
SCHOTTKY BARRIER DIODES
SENSITIVITY
VACUUM SYSTEMS
ELEMENTS
ISOTOPES
NONMETALS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
430300* - Particle Accelerators- Auxiliaries & Components
700320 - Plasma Diagnostic Techniques & Instrumentation- (1992-)