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Title: Structure and mechanical properties of epitaxial TiN/V[sub 0. 3]Nb[sub 0. 7]N(100) superlattices

Abstract

Epitaxial TiN/V[sub 0.3]Nb[sub 0.7]N superlattices with a 1.7% lattice mismatch between the layers were grown by reactive magnetron sputtering on MgO(001) substrates. Superlattice structure, crystalline perfection, composition modulation amplitudes, and coherency strains were studied using transmission electron microscopy and x-ray diffraction. Hardness [ital H] and elastic modulus were measured by nanoindentation. [ital H] increased rapidly with increasing [Lambda], peaking at [ital H] values [approx]75% greater than rule-of-mixtures values at [Lambda][approx]6 nm, before decreasing slightly with further increases in [Lambda]. A comparison with previously studied lattice-matched TiN/V[sub 0.6]Nb[sub 0.4]N superlattices, which had nearly identical composition modulation amplitudes, showed a similar [ital H] variation, but a smaller [ital H] enhancement of [approx]50%. The results suggest that coherency strains, which were larger for the mismatched TiN/V[sub 0.3]Nb[sub 0.7]N superlattices, were responsible for the larger hardness enhancement. The results are discussed in terms of coherency strain theories developed for spinodally decomposed materials. Nanoindenter elastic modulus results showed no significant anomalies.

Authors:
;  [1]; ;  [2];  [3]
  1. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
  2. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
  3. Department of Physics, Linkoeping University, S-581 83 Linkoeping (Sweden)
Publication Date:
OSTI Identifier:
7046449
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research; (United States)
Additional Journal Information:
Journal Volume: 9:6; Journal ID: ISSN 0884-2914
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; NIOBIUM NITRIDES; MECHANICAL PROPERTIES; MICROSTRUCTURE; TITANIUM NITRIDES; VANADIUM NITRIDES; EPITAXY; HARDNESS; SPUTTERING; SUPERLATTICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION; COHERENT SCATTERING; DIFFRACTION; ELECTRON MICROSCOPY; FILMS; MICROSCOPY; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; REFRACTORY METAL COMPOUNDS; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS; 360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies; 360203 - Ceramics, Cermets, & Refractories- Mechanical Properties

Citation Formats

Mirkarimi, P B, Barnett, S A, Hubbard, K M, Jervis, T R, and Hultman, L. Structure and mechanical properties of epitaxial TiN/V[sub 0. 3]Nb[sub 0. 7]N(100) superlattices. United States: N. p., 1994. Web. doi:10.1557/JMR.1994.1456.
Mirkarimi, P B, Barnett, S A, Hubbard, K M, Jervis, T R, & Hultman, L. Structure and mechanical properties of epitaxial TiN/V[sub 0. 3]Nb[sub 0. 7]N(100) superlattices. United States. https://doi.org/10.1557/JMR.1994.1456
Mirkarimi, P B, Barnett, S A, Hubbard, K M, Jervis, T R, and Hultman, L. Wed . "Structure and mechanical properties of epitaxial TiN/V[sub 0. 3]Nb[sub 0. 7]N(100) superlattices". United States. https://doi.org/10.1557/JMR.1994.1456.
@article{osti_7046449,
title = {Structure and mechanical properties of epitaxial TiN/V[sub 0. 3]Nb[sub 0. 7]N(100) superlattices},
author = {Mirkarimi, P B and Barnett, S A and Hubbard, K M and Jervis, T R and Hultman, L},
abstractNote = {Epitaxial TiN/V[sub 0.3]Nb[sub 0.7]N superlattices with a 1.7% lattice mismatch between the layers were grown by reactive magnetron sputtering on MgO(001) substrates. Superlattice structure, crystalline perfection, composition modulation amplitudes, and coherency strains were studied using transmission electron microscopy and x-ray diffraction. Hardness [ital H] and elastic modulus were measured by nanoindentation. [ital H] increased rapidly with increasing [Lambda], peaking at [ital H] values [approx]75% greater than rule-of-mixtures values at [Lambda][approx]6 nm, before decreasing slightly with further increases in [Lambda]. A comparison with previously studied lattice-matched TiN/V[sub 0.6]Nb[sub 0.4]N superlattices, which had nearly identical composition modulation amplitudes, showed a similar [ital H] variation, but a smaller [ital H] enhancement of [approx]50%. The results suggest that coherency strains, which were larger for the mismatched TiN/V[sub 0.3]Nb[sub 0.7]N superlattices, were responsible for the larger hardness enhancement. The results are discussed in terms of coherency strain theories developed for spinodally decomposed materials. Nanoindenter elastic modulus results showed no significant anomalies.},
doi = {10.1557/JMR.1994.1456},
url = {https://www.osti.gov/biblio/7046449}, journal = {Journal of Materials Research; (United States)},
issn = {0884-2914},
number = ,
volume = 9:6,
place = {United States},
year = {1994},
month = {6}
}