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Title: Thermochemical Analysis for Purification of Polysilicon Melts

Abstract

Chemical Equilibrium calculations are presented that are relevant to the purification of molten silicon by gas-blowing. The equilibrium distributions of silicon, boron, phosphorus carbon and iron among the solid, liquid and gas phases are reported for a variety of added chemicals, temperatures and total pressures. The identities of the dominant chemical species for each element in each phase are also provided for these conditions. The added gases examined are O(2), air, water, wet air, HCl, Cl(2), Cl(2)/O(2), SiCl(4), NH(3), NH(4)OH, and NH(4)Cl. These calculations suggest possible purification schemes, although kinetic or transport limitations may prove to be significant

Authors:
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
Sponsoring Org.:
USDOE
OSTI Identifier:
7016
Report Number(s):
SAND99-1047
ON: DE00007016
DOE Contract Number:
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; Silicon; Polycrystals; Chemical Reactions; Equilibrium; Purification; Liquids

Citation Formats

Ho, Pauline: Gee, James M. Thermochemical Analysis for Purification of Polysilicon Melts. United States: N. p., 1999. Web. doi:10.2172/7016.
Ho, Pauline: Gee, James M. Thermochemical Analysis for Purification of Polysilicon Melts. United States. doi:10.2172/7016.
Ho, Pauline: Gee, James M. Sat . "Thermochemical Analysis for Purification of Polysilicon Melts". United States. doi:10.2172/7016. https://www.osti.gov/servlets/purl/7016.
@article{osti_7016,
title = {Thermochemical Analysis for Purification of Polysilicon Melts},
author = {Ho, Pauline: Gee, James M.},
abstractNote = {Chemical Equilibrium calculations are presented that are relevant to the purification of molten silicon by gas-blowing. The equilibrium distributions of silicon, boron, phosphorus carbon and iron among the solid, liquid and gas phases are reported for a variety of added chemicals, temperatures and total pressures. The identities of the dominant chemical species for each element in each phase are also provided for these conditions. The added gases examined are O(2), air, water, wet air, HCl, Cl(2), Cl(2)/O(2), SiCl(4), NH(3), NH(4)OH, and NH(4)Cl. These calculations suggest possible purification schemes, although kinetic or transport limitations may prove to be significant},
doi = {10.2172/7016},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat May 01 00:00:00 EDT 1999},
month = {Sat May 01 00:00:00 EDT 1999}
}

Technical Report:

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