Process for preparing superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
This patent describes a process for coating a layer of superconductive material with a thickness of from about 0.1 to about 500 microns onto a substrate at a deposition rate of from about 0.01 to about 10 microns per minute per 335 square centimeters of substrate surface. It comprises: providing a solution comprised of an yttrium compound, a barium compound, and a copper compound; subjecting the solution to ultrasonic sound waves at a frequency in excess of 20,000 hertz; providing a radio frequency plasma reactor; generating a hot plasma within the radio frequency reactor; contacting the aerosol with the hot plasma gas within the plasma reactor while subjecting the aerosol to a substantially atmospheric pressure of from about 600 to about 1,000 millimeters of mercury and to a radio frequency alternating current at a frequency of from about 100 kilohertz to about 30 megahertz, thereby forming a vapor; providing a substrate disposed outside of the plasma reactor; providing a substrate holder in contact with the substrate; electrically grounding the substrate holder; and contacting the vapor with the substrate; thereby forming a superconductive film in the as deposited state.
- Assignee:
- Alfred Univ., Alfred, NY (United States)
- Patent Number(s):
- US 5157015; A
- Application Number:
- PPN: US 7-528147; TRN: 93-005128
- OSTI ID:
- 7012788
- Resource Relation:
- Patent File Date: 24 May 1990
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
CUPRATES
SUPERCONDUCTIVITY
HOT PLASMA
PLASMA PRODUCTION
SUPERCONDUCTING FILMS
FABRICATION
YTTRIUM COMPOUNDS
CHEMICAL COMPOSITION
RF SYSTEMS
THICKNESS
COPPER COMPOUNDS
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FILMS
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PLASMA
TRANSITION ELEMENT COMPOUNDS
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