Laser patterning of metal-oxide superconductor films by reactive solid-state transformation

Technical Report · Mon Feb 01 00:00:00 EST 1988

OSTI ID:7009297

Rothchild, M; Sedlacek, J H; Black, J G; Ehrlich, D J

A planar submicrometer-resolution patterning method was developed for fabrication of thin-film Ba/sub 2/YCu/sub 3/Ox devices without photoresist, water, or solvent exposure. The method is based on a rapid transformation from the superconductive to a dielectric phase. The phase change is induced by controlled changes in the oxygen stoichiometry which are induced thermally by local-area laser irradiation of the thin film in a gaseous ambient. Both extended-area pattern projection and scanned-beam direct writing were demonstrated with a spatial resolution in the submicrometer range and presently limited by the grain size of available films. Negligible thickness loss is observed in patterning. The method circumvents lithographic techniques that tend to degrade the electronic quality of Ba/sub 2/YCu/sub 3/Ox superconductors.

• Research Organization: Massachusetts Inst. of Tech., Lexington (USA). Lincoln Lab.
• OSTI ID: 7009297
• Report Number(s): AD-A-192630/2/XAB; JA-6057
• Resource Relation: Other Information: Pub. in IEEE Electron Device Letters, Vol. 9, No. 2, 68-70(Feb 1988)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
SUPERCONDUCTORS
COPPER OXIDES
SUPERCONDUCTING FILMS
FABRICATION
PHASE TRANSFORMATIONS
YTTRIUM OXIDES
CONTROL
GRAIN SIZE
IRRADIATION
LASER RADIATION
LOSSES
OXIDES
RESOLUTION
SOLVENTS
SPATIAL DISTRIBUTION
STOICHIOMETRY
THICKNESS
THIN FILMS
TRANSFORMATIONS
WATER
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CRYSTAL STRUCTURE
DIMENSIONS
DISTRIBUTION
ELECTROMAGNETIC RADIATION
FILMS
HYDROGEN COMPOUNDS
MICROSTRUCTURE
OXYGEN COMPOUNDS
RADIATIONS
SIZE
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies