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Title: Surface roughness scaling of plasma polymer films

Abstract

Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness [sigma] increases with film thickness [tau] as [sigma]([ital f][lt][xi][sup [minus]1])[similar to][tau][beta], and with measurement length [ital L] as [sigma]([ital f][gt][ital L][sup [minus]1][gt][xi][sup [minus]1])[similar to][ital L][alpha], where [xi] is the surface roughness correlation length. At the deposition rate [ital R]=2[mu][ital m]/[ital h], the scaling exponents [alpha] and [beta] are 0.9 and 0.7, both increasing to 1 at [ital R]=1[mu][ital m]/[ital h]. A competition between surface relaxation and deposition rate determine [sigma] and [xi], which increase rapidly with [ital R] or inverse temperature.

Authors:
; ; ; ;  [1]
  1. Lawrence Livermore National Laboratory, Livermore, California 94551 (United States)
Publication Date:
OSTI Identifier:
7005298
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Journal Article
Journal Name:
Physical Review Letters; (United States)
Additional Journal Information:
Journal Volume: 73:5; Journal ID: ISSN 0031-9007
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; POLYMERS; CHEMICAL VAPOR DEPOSITION; GROWTH; MORPHOLOGY; ROUGHNESS; SCALING LAWS; STRESS RELAXATION; CHEMICAL COATING; DEPOSITION; RELAXATION; SURFACE COATING; SURFACE PROPERTIES; 360601* - Other Materials- Preparation & Manufacture; 360602 - Other Materials- Structure & Phase Studies; 661300 - Other Aspects of Physical Science- (1992-)

Citation Formats

Collins, G W, Letts, S A, Fearon, E M, McEachern, R L, and Bernat, T P. Surface roughness scaling of plasma polymer films. United States: N. p., 1994. Web. doi:10.1103/PhysRevLett.73.708.
Collins, G W, Letts, S A, Fearon, E M, McEachern, R L, & Bernat, T P. Surface roughness scaling of plasma polymer films. United States. https://doi.org/10.1103/PhysRevLett.73.708
Collins, G W, Letts, S A, Fearon, E M, McEachern, R L, and Bernat, T P. 1994. "Surface roughness scaling of plasma polymer films". United States. https://doi.org/10.1103/PhysRevLett.73.708.
@article{osti_7005298,
title = {Surface roughness scaling of plasma polymer films},
author = {Collins, G W and Letts, S A and Fearon, E M and McEachern, R L and Bernat, T P},
abstractNote = {Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness [sigma] increases with film thickness [tau] as [sigma]([ital f][lt][xi][sup [minus]1])[similar to][tau][beta], and with measurement length [ital L] as [sigma]([ital f][gt][ital L][sup [minus]1][gt][xi][sup [minus]1])[similar to][ital L][alpha], where [xi] is the surface roughness correlation length. At the deposition rate [ital R]=2[mu][ital m]/[ital h], the scaling exponents [alpha] and [beta] are 0.9 and 0.7, both increasing to 1 at [ital R]=1[mu][ital m]/[ital h]. A competition between surface relaxation and deposition rate determine [sigma] and [xi], which increase rapidly with [ital R] or inverse temperature.},
doi = {10.1103/PhysRevLett.73.708},
url = {https://www.osti.gov/biblio/7005298}, journal = {Physical Review Letters; (United States)},
issn = {0031-9007},
number = ,
volume = 73:5,
place = {United States},
year = {Mon Aug 01 00:00:00 EDT 1994},
month = {Mon Aug 01 00:00:00 EDT 1994}
}