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Title: Improvements in the accuracy and the repeatability of long trace profiler measurements

Abstract

Modifications of the long trace profiler at the Advanced Photon Source at Argonne National Laboratory have significantly improved its accuracy and repeatability for measuring the figure of large flat and long-radius mirrors. Use of a Dove prism in the reference beam path corrects phasing problems between mechanical errors and thermally induced system errors. A single reference correction now completely removes both of these error signals from the measured surface profile. The addition of a precision air conditioner keeps the temperature in the metrology enclosure constant to within {plus_minus}0.1&hthinsp;{degree}C over a 24-h period and has significantly improved the stability and the repeatability of the measurements. Long-radius surface curvatures can now be measured absolutely with a high degree of confidence. These improved capabilities are illustrated with a series of measurements of a 500-mm-long mirror with a 5-km radius of curvature. The standard deviation in the average of ten slope profile scans is 0.3 {mu}rad, and the corresponding standard deviation in the height error is 4.6 nm. {copyright} 1999 Optical Society of America

Authors:
;  [1];  [2];  [3]
  1. Brookhaven National Laboratory, P. O. Box 5000, Upton, New York 11973 (United States)
  2. Steward Observatory, University of Arizona, 933 North Cherry Avenue, Tucson, Arizona 85721 (United States)
  3. Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, Illinois 60439 (United States)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
OSTI Identifier:
698825
DOE Contract Number:  
AC02-98CH10886; W-31109-ENG-38
Resource Type:
Journal Article
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 38; Journal Issue: 25; Other Information: PBD: Sep 1999
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; SYNCHROTRON RADIATION; X-RAY EQUIPMENT; MIRRORS; ADVANCED PHOTON SOURCE; SURFACE PROPERTIES; SHAPE; ERRORS

Citation Formats

Takacs, P.Z., Church, E.L., Bresloff, C.J., and Assoufid, L. Improvements in the accuracy and the repeatability of long trace profiler measurements. United States: N. p., 1999. Web. doi:10.1364/AO.38.005468.
Takacs, P.Z., Church, E.L., Bresloff, C.J., & Assoufid, L. Improvements in the accuracy and the repeatability of long trace profiler measurements. United States. doi:10.1364/AO.38.005468.
Takacs, P.Z., Church, E.L., Bresloff, C.J., and Assoufid, L. Wed . "Improvements in the accuracy and the repeatability of long trace profiler measurements". United States. doi:10.1364/AO.38.005468.
@article{osti_698825,
title = {Improvements in the accuracy and the repeatability of long trace profiler measurements},
author = {Takacs, P.Z. and Church, E.L. and Bresloff, C.J. and Assoufid, L.},
abstractNote = {Modifications of the long trace profiler at the Advanced Photon Source at Argonne National Laboratory have significantly improved its accuracy and repeatability for measuring the figure of large flat and long-radius mirrors. Use of a Dove prism in the reference beam path corrects phasing problems between mechanical errors and thermally induced system errors. A single reference correction now completely removes both of these error signals from the measured surface profile. The addition of a precision air conditioner keeps the temperature in the metrology enclosure constant to within {plus_minus}0.1&hthinsp;{degree}C over a 24-h period and has significantly improved the stability and the repeatability of the measurements. Long-radius surface curvatures can now be measured absolutely with a high degree of confidence. These improved capabilities are illustrated with a series of measurements of a 500-mm-long mirror with a 5-km radius of curvature. The standard deviation in the average of ten slope profile scans is 0.3 {mu}rad, and the corresponding standard deviation in the height error is 4.6 nm. {copyright} 1999 Optical Society of America},
doi = {10.1364/AO.38.005468},
journal = {Applied Optics},
number = 25,
volume = 38,
place = {United States},
year = {1999},
month = {9}
}