Imaging x-ray multilayer structures using cross-sectional high resolution electron microscopy

Journal Article · Tue Dec 01 00:00:00 EST 1992 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.351996· OSTI ID:6960677

Cheng, Y; Smith, D J; Stearns, M B ^[1]; Stearns, D G ^[2]

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1. Department of Physics and Astronomy, Arizona State University, Tempe, Arizona 85287 (United States)
2. University of California, Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)

Mo/Si soft x-ray multilayer films have been imaged in cross section by high resolution electron microscopy and the dependence of important multilayer parameters on imaging conditions has been investigated. Multiple measurements of the widths of the Mo crystalline layers were made from images recorded as part of a through-focal series. The layer thicknesses were found to be insensitive to the focus setting near the Scherzer defocus value (+160 A to {minus}800 A). At larger defocus conditions, however, additional Mo fringes were visible so that the Mo crystalline region seemed to become thicker at the expense of the pure Si and interlayer regions. Micrographs recorded with the ML slightly tilted ({similar to}1--2{degree}) from the edge-on orientation suggested thicker Mo and thinner Si and interlayer regions but the apparent bilayer periodicity did not change measurably. The possibility of changes in multilayer structure induced during cross-sectional specimen preparation was also shown. Finally, the results of the image analysis are compared with those obtained from small and large angle x-ray scattering experiments from the same sample.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6960677
• Journal Information: Journal of Applied Physics; (United States), Vol. 72:11; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
MOLYBDENUM
MICROSTRUCTURE
SILICON
CROSS SECTIONS
GRAIN ORIENTATION
LAYERS
SOFT X RADIATION
TRANSMISSION ELECTRON MICROSCOPY
CRYSTAL STRUCTURE
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
ELEMENTS
IONIZING RADIATIONS
METALS
MICROSCOPY
ORIENTATION
RADIATIONS
SEMIMETALS
TRANSITION ELEMENTS
X RADIATION
360102* - Metals & Alloys- Structure & Phase Studies