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Title: Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering

Abstract

We report the deposition of crystalline as-deposited ion beam sputtered Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} thin films with orientations of (100), (001), and (110)/(103) and a method for controlling the orientation of the films. Films deposited on Al{sub 2}O{sub 3} Yttria (9%) stabilized ZrO{sub 2} typically have a near random orientation, while the films on MgO show a high degree of orientation. In addition, post deposition heat treatments at 500 C were found to reduce the room temperature resisitivity significantly, although no superconducting material, maintaining a specular surface. RBS analysis shows a variation in the composition as a function of substrate position on the platen, which indicates a re-sputtering mechanism due to highly energetic neutrals from the target surface.

Authors:
; ; ;  [1]
  1. IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598 (USA)
Publication Date:
OSTI Identifier:
6949186
Report Number(s):
CONF-881035-
Journal ID: ISSN 0094-243X; CODEN: APCPC; TRN: 90-017257
Resource Type:
Conference
Journal Name:
AIP Conference Proceedings (American Institute of Physics); (USA)
Additional Journal Information:
Journal Volume: 182:1; Conference: Topical conference on high- Tc superconducting thin films, devices, and characterization, Atlanta, GA (USA), 3 Oct 1988; Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; BARIUM OXIDES; SUPERCONDUCTIVITY; COPPER OXIDES; YTTRIUM OXIDES; ALUMINIUM OXIDES; ANNEALING; ELECTRICAL PROPERTIES; FABRICATION; ION BEAMS; MAGNESIUM OXIDES; SPUTTERING; SUBSTRATES; TEMPERATURE CONTROL; THIN FILMS; ZIRCONIUM OXIDES; ALKALINE EARTH METAL COMPOUNDS; ALUMINIUM COMPOUNDS; BARIUM COMPOUNDS; BEAMS; CHALCOGENIDES; CONTROL; COPPER COMPOUNDS; ELECTRIC CONDUCTIVITY; FILMS; HEAT TREATMENTS; MAGNESIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS; ZIRCONIUM COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication

Citation Formats

Doyle, J P, Roy, R A, Yee, D S, and Cuomo, J J. Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering. United States: N. p., 1989. Web.
Doyle, J P, Roy, R A, Yee, D S, & Cuomo, J J. Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering. United States.
Doyle, J P, Roy, R A, Yee, D S, and Cuomo, J J. 1989. "Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering". United States.
@article{osti_6949186,
title = {Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering},
author = {Doyle, J P and Roy, R A and Yee, D S and Cuomo, J J},
abstractNote = {We report the deposition of crystalline as-deposited ion beam sputtered Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} thin films with orientations of (100), (001), and (110)/(103) and a method for controlling the orientation of the films. Films deposited on Al{sub 2}O{sub 3} Yttria (9%) stabilized ZrO{sub 2} typically have a near random orientation, while the films on MgO show a high degree of orientation. In addition, post deposition heat treatments at 500 C were found to reduce the room temperature resisitivity significantly, although no superconducting material, maintaining a specular surface. RBS analysis shows a variation in the composition as a function of substrate position on the platen, which indicates a re-sputtering mechanism due to highly energetic neutrals from the target surface.},
doi = {},
url = {https://www.osti.gov/biblio/6949186}, journal = {AIP Conference Proceedings (American Institute of Physics); (USA)},
issn = {0094-243X},
number = ,
volume = 182:1,
place = {United States},
year = {Wed Feb 01 00:00:00 EST 1989},
month = {Wed Feb 01 00:00:00 EST 1989}
}

Conference:
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