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Title: Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1

Abstract

The section on contamination control is divided into the following areas: advanced cleanroom design and operation; liquid and gas filtration; particle counting in process atmospheres and fluids; high-purity liquids; characterization and control of process chemical contamination; high-purity gases; characterization and control of process defects; APIMS--fundamentals and challenges; advanced wafer cleaning technology; APIMS--applications and technology; waste minimization for wafer cleaning processes; specialty gas purity roadmap panel discussion; contamination aspects of the aerospace industry; surface contamination measurement--particles; modeling for contamination reduction; surface contamination measurement--metals; statistical aspects of contamination control; surface contaminant measurement--organics. The symposium on minienvironments is divided into the following areas: industry standards and trends; SEMATECH study I; studies and applications of minienvironments; design of minienvironments; and testing. Symposium on biocontamination control is divided into advanced microbial contamination control systems and methods and regulatory considerations and international standards for microbial contamination control. Separate abstracts were prepared for 13 papers in this volume.

Publication Date:
OSTI Identifier:
6921030
Alternate Identifier(s):
OSTI ID: 6921030
Report Number(s):
CONF-940510--
ISBN: 1-877862-45-2
Resource Type:
Conference
Resource Relation:
Conference: 40. annual technical meeting and exposition of the Institute of Environmental Sciences (IES), Rosemont, IL (United States), 1-6 May 1994
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; CLEAN ROOMS; MEETINGS; CONTROLLED ATMOSPHERES; AIR FILTERS; AIR FLOW; CLEANING; LEADING ABSTRACT; ABSTRACTS; ATMOSPHERES; DOCUMENT TYPES; EQUIPMENT; FILTERS; FLUID FLOW; GAS FLOW; POLLUTION CONTROL EQUIPMENT 420202* -- Engineering-- Protective Structures & Equipment

Citation Formats

Not Available. Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1. United States: N. p., 1994. Web.
Not Available. Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1. United States.
Not Available. Sat . "Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1". United States.
@article{osti_6921030,
title = {Contamination control, symposium on minienvironments, symposium on biocontamination control. 1994 proceedings, Volume 1},
author = {Not Available},
abstractNote = {The section on contamination control is divided into the following areas: advanced cleanroom design and operation; liquid and gas filtration; particle counting in process atmospheres and fluids; high-purity liquids; characterization and control of process chemical contamination; high-purity gases; characterization and control of process defects; APIMS--fundamentals and challenges; advanced wafer cleaning technology; APIMS--applications and technology; waste minimization for wafer cleaning processes; specialty gas purity roadmap panel discussion; contamination aspects of the aerospace industry; surface contamination measurement--particles; modeling for contamination reduction; surface contamination measurement--metals; statistical aspects of contamination control; surface contaminant measurement--organics. The symposium on minienvironments is divided into the following areas: industry standards and trends; SEMATECH study I; studies and applications of minienvironments; design of minienvironments; and testing. Symposium on biocontamination control is divided into advanced microbial contamination control systems and methods and regulatory considerations and international standards for microbial contamination control. Separate abstracts were prepared for 13 papers in this volume.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

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