Broad-beam multi-ampere metal ion source

Conference · Mon Jan 01 00:00:00 EST 1990 · Review of Scientific Instruments; (USA)

OSTI ID:6917020

Brown, I G; Galvin, J E; MacGill, R A ^[1]; Paoloni, F J ^[2]

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1. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (US)
2. Electrical Engineering Department, University of Wollongong, Wollongong NSW 2500, (Australia)

An embodiment of the MEVVA (metal vapor vacuum arc) high current metal ion source has been developed in which the beam is formed from a 10-cm-diam set of extractor grids and which produces a peak beam current of up to several amperes. The source, MEVVA V, operates in a pulsed mode with a pulsewidth, at present, of 0.25 ms and a repetition rate of up to several tens of pulses per second (power supply limited). The multi-cathode feature that was developed for the prior source version, MEVVA IV, has been incorporated here also; one can switch among any of 18 separate cathodes and thus metallic beam species. Maximum beam extraction voltage is over 90 kV, and since the ion charge states are typically from {ital Q}=1 to 5, depending on the metal employed, the ion energy in the extracted beam can thus be up to several hundred keV. This source is a new addition to the MEVVA family of metal ion sources, and we are at present investigating the operational regimes and the limits to the source performance. In this article we describe the source, and present some preliminary results.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 6917020
• Report Number(s): CONF-890703-; CODEN: RSINA; TRN: 90-014391
• Journal Information: Review of Scientific Instruments; (USA), Vol. 61:1; Conference: International conference on ion sources, Berkeley, CA (USA), 10-14 Jul 1989; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ION SOURCES
DESIGN
BEAM CURRENTS
LAWRENCE BERKELEY LABORATORY
OPERATION
PULSE RISE TIME
CURRENTS
NATIONAL ORGANIZATIONS
TIMING PROPERTIES
US AEC
US DOE
US ERDA
US ORGANIZATIONS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions