Partial least squares for mass spectral analysis of H[sub 2] and D[sub 2] plasma scrambling products
- Delaware Univ., Newark, DE (United States)
In this paper the application of the partial least squares (PLS) method to resolve the mass spectrum of hydrogen an deuterium scrambling in a fast flow plasma reactor is reported. Calibration was performed by using a mixture of hydrogen, deuterium, an deuterium hydride, and the model predictions were validated against the experimental results. The calibration model was then extended to actual plasma scrambling experiments, and the effects of power, residence time, pressure, and inlet mole fraction of H[sub 2] and D[sub 2] were investigated. While residence time and applied power were found to have no significant effect on the deuterium hydride concentration within the operating regime tested here, changes in pressure and inlet mole fraction affected the conversion of H[sub 2] and D[sub 2] to HD, as expected. The results from this study can be applied toward a more rational design of fast flow plasma or downstream etching reactors used in advanced materials fabrication.
- OSTI ID:
- 6916031
- Journal Information:
- Industrial and Engineering Chemistry Research; (United States), Vol. 31:8; ISSN 0888-5885
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL REACTORS
DESIGN
ETCHING
PLASMA
MASS SPECTRA
CALIBRATION
DEUTERIUM
HYDROGEN
HYDROGEN DEUTERIDE
LEAST SQUARE FIT
MATERIALS WORKING
PLASMA DRIFT
DEUTERIDES
DEUTERIUM COMPOUNDS
ELEMENTS
FABRICATION
HYDROGEN COMPOUNDS
HYDROGEN ISOTOPES
ISOTOPES
LIGHT NUCLEI
MAXIMUM-LIKELIHOOD FIT
NONMETALS
NUCLEI
NUMERICAL SOLUTION
ODD-ODD NUCLEI
SPECTRA
STABLE ISOTOPES
SURFACE FINISHING
400102* - Chemical & Spectral Procedures
665000 - Physics of Condensed Matter- (1992-)