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Title: Torque elimination fittings prevent ultra-high purity gas corrosion site

Abstract

The standard metal face seal fitting is used throughout the semiconductor industry on process lines that span the range from high pressure to high vacuum. Leakage of fluids out of a system may be catastrophic in those containing toxic, corrosive, or pyrophoric materials. Leakage of moisture and particles into a system has a negative impact on product yields and life expectancy of a gas system because of internal corrosion. This article addresses leakage both into and out of a gas system from fittings under normal and more challenging applications. Torque elimination enhances the reliable functioning of metal face seal fittings that are exposed to shock/vibration.

Authors:
;  [1]
  1. Lawrence Livermore National Lab., CA (United States)
Publication Date:
OSTI Identifier:
691506
Resource Type:
Journal Article
Journal Name:
Materials Performance
Additional Journal Information:
Journal Volume: 38; Journal Issue: 9; Other Information: PBD: Sep 1999
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; METAL INDUSTRY; PIPE FITTINGS; HAZARDOUS MATERIALS SPILLS; CORROSION; SEALS; TORQUE; GASES; RELIABILITY

Citation Formats

Robinson, E.R., and Tassano, J.B. Torque elimination fittings prevent ultra-high purity gas corrosion site. United States: N. p., 1999. Web.
Robinson, E.R., & Tassano, J.B. Torque elimination fittings prevent ultra-high purity gas corrosion site. United States.
Robinson, E.R., and Tassano, J.B. Wed . "Torque elimination fittings prevent ultra-high purity gas corrosion site". United States.
@article{osti_691506,
title = {Torque elimination fittings prevent ultra-high purity gas corrosion site},
author = {Robinson, E.R. and Tassano, J.B.},
abstractNote = {The standard metal face seal fitting is used throughout the semiconductor industry on process lines that span the range from high pressure to high vacuum. Leakage of fluids out of a system may be catastrophic in those containing toxic, corrosive, or pyrophoric materials. Leakage of moisture and particles into a system has a negative impact on product yields and life expectancy of a gas system because of internal corrosion. This article addresses leakage both into and out of a gas system from fittings under normal and more challenging applications. Torque elimination enhances the reliable functioning of metal face seal fittings that are exposed to shock/vibration.},
doi = {},
journal = {Materials Performance},
number = 9,
volume = 38,
place = {United States},
year = {1999},
month = {9}
}